@article{KeshavarziLimaKronastetal.2018,
  author    = {Shervin Keshavarzi and Frederico Lima and Wolfgang Kronast and Ulrich Mescheder},
  title     = {Sequential Nano-Explosion Using Patterned Porous Silicon},
  series   = {Journal of Microelectromechanical Systems},
  volume    = {27.2018},
  number    = {2},
  issn      = {1057-7157},
  doi       = {10.1109/JMEMS.2018.2797306},
  pages     = {250 -- 258},
  year      = {2018},
  language  = {en}
}