@article{MackensMeschederMundetal.1989,
  author    = {U. Mackens and Ulrich Mescheder and F. Mund and H. L{\"u}thje and H. Lifka and C.A.H. Juffermans and P.H. Woerlee and A.J. Walker},
  title     = {Fabrication of 0.5 μm NMOS-devices by all level X-ray lithography},
  series   = {Microelectronic Engineering},
  volume    = {09.1989},
  number    = {1-4},
  issn      = {0167-9317},
  doi       = {10.1016/0167-9317(89)90020-8},
  pages     = {89 -- 92},
  year      = {1989},
  language  = {en}
}