@inproceedings{ZanderMescheder1991,
  author    = {M. Zander and Ulrich Mescheder},
  title     = {Maskenmetrologie: Anforderungen und Trends},
  series = {Maskentechnik f{\"u}r Mikroelektronik-Bausteine : Tagungsbericht ; Tagung M{\"u}nchen, 14. November 1991},
  publisher = {VDI-Verlag},
  address   = {D{\"u}sseldorf},
  isbn      = {3-18-090935-8},
  pages     = {7 -- 40},
  year      = {1991},
  language  = {de}
}