@inproceedings{MeschederKovacsFahadetal.2002,
  author    = {Ulrich Mescheder and Andras Kovacs and A. Fahad and Rolf Huster},
  title     = {3D structuring of c-Si using porous silicon as sacrificial material},
  series = {Proceedings of the 2002 2nd IEEE Conference on Nanotechnology: IEEE-NAN0 2002; August 26-28, Washington D.C.},
  isbn      = {0-7803-7538-6},
  doi       = {10.1109/NANO.2002.1032117},
  pages     = {33 -- 36},
  year      = {2002},
  language  = {en}
}