@inproceedings{FreudenreichMeschederSomogyi2003, author = {Markus Freudenreich and Ulrich Mescheder and Gergoe Somogyi}, title = {Design Consideration and Realization of a Novel Micromechanical Bi-Stable Switch}, series = {Transducers '03: The 12th International Conference on Solid-State Sensors, Actuators and Microsystems; Digest of Technical Papers, Volume 2}, publisher = {IEEE}, isbn = {0-7803-7731-1}, pages = {1096 -- 1099}, year = {2003}, language = {en} }