@article{MeschederKronastNaychuk2004,
  author    = {Ulrich Mescheder and Wolfgang Kronast and N. Naychuk},
  title     = {Reliability investigations in micromechanical devices},
  series   = {Sensors and Actuators A: Physical},
  volume    = {110.2004},
  number    = {1-3},
  issn      = {0924-4247},
  doi       = {10.1016/j.sna.2003.10.054},
  pages     = {150 -- 156},
  year      = {2004},
  language  = {en}
}