@inproceedings{HellmuthKhrennikovKronastetal.2008, author = {T. Hellmuth and Konstantin Khrennikov and Wolfgang Kronast and Rolf Huster and Ulrich Mescheder}, title = {Optimisation and characterisation of parabolic membrane mirrors}, series = {Proceeedings of SPIE: Volume 6993; MEMS, MOEMS, and Micromachining III, 9–10 April 2008, Strasbourg, France}, isbn = {978-0-8194-7191-8}, doi = {10.1117/12.797940}, year = {2008}, language = {en} }