@inproceedings{HilderingBecsiEngeletal.2012, author = {S. Hildering and Laszlo Becsi and U. Engel and M. Merklein and Ulrich Mescheder}, title = {Experimental investigations on high-precision microcutting of copper foils with microfabricated silicon punches}, series = {Proceedings of the 12th international conference of the european society for precision engineering and nanotechnology, June 4th - 7th 2012, Stockholm, Sweden, Volume II}, publisher = {Euspen}, address = {Bedford}, isbn = {978-0-9566790-0-0}, pages = {177 -- 180}, year = {2012}, language = {en} }