@book{Mescheder2000,
  author    = {Ulrich Mescheder},
  title     = {Mikrosystemtechnik : Konzepte und Anwendungen},
  publisher = {Teubner},
  address   = {Stuttgart},
  isbn      = {3-519-06256-9},
  pages     = {323},
  year      = {2000},
  language  = {de}
}