@incollection{Mescheder2003,
  author    = {Ulrich Mescheder},
  title     = {Modern Silicon-based MEMS Technology},
  series = {Smart Sensors and MEMS},
  publisher = {Kluwer Academic Publishers},
  address   = {Dordrecht},
  isbn      = {1-4020-2928-4},
  pages     = {255 -- 272},
  year      = {2003},
  language  = {de}
}