@article{BanghardHartmannSilmyetal.2016, author = {Michael Banghard and Romy Hartmann and Kamel Silmy and Wilfried Nisch and Rene P. von Metzen and Alfred Stett and Volker Bucher}, title = {High voltage insulation properties of DLC-Parylene multilayer films for microsurgery instruments}, series = {Microelectronic Engineering}, volume = {153.2016}, issn = {0167-9317}, doi = {10.1016/j.mee.2016.03.057}, pages = {126 -- 131}, year = {2016}, language = {en} }