@inproceedings{KeshavarziKovacsMescheder2023,
  author    = {Shervin Keshavarzi and Andras Kovacs and Ulrich Mescheder},
  title     = {Surface Passivated Porous Silicon-Based Antireflective Coating},
  series = {MikroSystemTechnik Kongress 2023, 23. - 25. Oktober 2023, Dresden, Germany},
  year      = {2023},
  language  = {en}
}