@article{PaknejadAzarhoushangZahedietal.2023,
  author    = {Masih Paknejad and Bahman Azarhoushang and Ali Zahedi and Mehdi Khakrangin and Mohammadali Kadivar},
  title     = {Investigation of material removal mechanisms of laser-structured Si3N4 via single diamond grit scratching},
  series   = {The International Journal of Advanced Manufacturing Technology},
  volume    = {125.2023},
  number    = {5-6},
  issn      = {1433-3015},
  doi       = {10.1007/s00170-022-10793-0},
  url       = {https://nbn-resolving.org/urn:nbn:de:bsz:fn1-opus4-93767},
  pages     = {2759 -- 2775},
  year      = {2023},
  language  = {en}
}