TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Soltani, Babak
A1  - Azarhoushang, Bahman
A1  - Zahedi, Ali
T1  - Laser ablation mechanism of silicon nitride with nanosecond and picosecond lasers
JF  - Optics & Laser Technology
KW  - Laser-material interaction
KW  - Silicon nitride
KW  - Nanosecond laser
KW  - Picosecond laser
KW  - Laser input energy density
Y1  - 2019
SN  - 0030-3992
SS  - 0030-3992
U6  - https://doi.org/10.1016/j.optlastec.2019.105644
DO  - https://doi.org/10.1016/j.optlastec.2019.105644
VL  - 119.2019
IS  - November
ER  -