@article{SoltaniAzarhoushangZahedi2019,
  author    = {Babak Soltani and Bahman Azarhoushang and Ali Zahedi},
  title     = {Laser ablation mechanism of silicon nitride with nanosecond and picosecond lasers},
  series   = {Optics \& Laser Technology},
  volume    = {119.2019},
  number    = {November},
  issn      = {0030-3992},
  doi       = {10.1016/j.optlastec.2019.105644},
  year      = {2019},
  language  = {en}
}