TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Soltani, Babak
A1  - Hojati, Faramarz
A1  - Daneshi, Amir
A1  - Azarhoushang, Bahman
T1  - Simulation of the laser-material interaction of ultrashort pulse laser processing of silicon nitride workpieces and the key factors in the ablation process
JF  - The International Journal of Advanced Manufacturing Technology
KW  - Ultrashort pulse laser
KW  - Laser power intensity
KW  - Laser ablation
KW  - Silicon nitride
KW  - Multiphoton ionisation
Y1  - 2021
UN  - https://nbn-resolving.org/urn:nbn:de:bsz:fn1-opus4-77825
SN  - 1433-3015
SS  - 1433-3015
U6  - https://doi.org/10.1007/s00170-021-07111-5
DO  - https://doi.org/10.1007/s00170-021-07111-5
VL  - 114.2021
IS  - 11
SP  - 3719
EP  - 3738
ER  -