TY  - MGZN
U1  - Beitrag zu einem Periodikum
A1  - Urschel, Aaron
A1  - Simon, Nicolai
A1  - Bucher, Volker
T1  - Research and First Experiments on Self Assembled Monolayers (SAM) for Area-Selective Atomic Layer Deposition
JF  - HFU Master research projects
N2  - This work gives the theoretical background which is needed to understand what self-assembling monolayers are, how they work, how and for what they can be used. A closer look is taken on the possibility to create an area selective atomic layer deposition process. In a practical experiment the foundation for this process is laid. Therefor a silicon wafer is coated with gold using a evaporation process. The gold samples are exposed to the SAMs solution to grow them. Contact angle measurements as well as Fourier transform Infrared spectroscopy are used to check the existence of SAMs on the gold samples. Also there is investigated if different exposure times make any differences.
Y1  - 2021
U6  - https://nbn-resolving.org/urn:nbn:de:bsz:fn1-opus4-76407
UN  - https://nbn-resolving.org/urn:nbn:de:bsz:fn1-opus4-76407
SN  - 2750-2619
SS  - 2750-2619
VL  - 1.2021
IS  - 1/2
SP  - 3
S1  - 3
ER  -