TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Kallmann, Ulrich
A1  - Lootze, Michael
A1  - Mescheder, Ulrich
T1  - Simulative and Experimental Characterization of an Adaptive Astigmatic Membrane Mirror
JF  - Micromachines
KW  - Adaptive optics
KW  - Optical simulation
KW  - Physical optics
KW  - Micro-optical electro-mechanical system (MOEMS)
KW  - Silicon-on-insulator (SOI)
Y1  - 2021
UN  - https://nbn-resolving.org/urn:nbn:de:bsz:fn1-opus4-71799
SN  - 2072-666X
SS  - 2072-666X
U6  - https://doi.org/10.3390/mi12020156
DO  - https://doi.org/10.3390/mi12020156
VL  - 12.2021
IS  - 2
SP  - 17
S1  - 17
ER  -