TY  - CHAP
U1  - Konferenzveröffentlichung
A1  - Passlack, Ulrike
A1  - Simon, Nicolai
A1  - Bucher, Volker
A1  - Harendt, Christine
A1  - Stieglitz, Thomas
A1  - Burghartz, Joachim N.
T1  - Investigation of Long-Term Stability of Hybrid Systems-in-Foil (HySiF) for Biomedical Applications
T2  - 2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC), 15-18 September 2020, Tonsberg, Vestfold Norway
KW  - Polyimides
KW  - Substrates
KW  - Silicon
KW  - Surface treatment
KW  - Atomic layer deposition
Y1  - 2020
SN  - 978-1-7281-6293-5
SB  - 978-1-7281-6293-5
U6  - https://doi.org/10.1109/ESTC48849.2020.9229795
DO  - https://doi.org/10.1109/ESTC48849.2020.9229795
SP  - 6
S1  - 6
ER  -