TY  - THES
U1  - Dissertation / Habilitation
A1  - Keshavarzi, Shervin
T1  - Silicon Needle-like Surfaces for Room Temperature Silicon-Silicon Bonding Applications
Y2  - 2019
U6  - https://nbn-resolving.org/urn:nbn:de:bsz:25-freidok-1515955
UN  - https://nbn-resolving.org/urn:nbn:de:bsz:25-freidok-1515955
SP  - 220
S1  - 220
ER  -