TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Soltani, Babak
A1  - Hojati, Faramarz
A1  - Daneshi, Amir
A1  - Azarhoushang, Bahman
T1  - Simulation of laser ablation mechanism of silicon nitride by ultrashort pulse laser
JF  - Procedia CIRP
KW  - Ultrashort pulse laser
KW  - Silicon nitride
KW  - Simulation
Y1  - 2019
UN  - https://nbn-resolving.org/urn:nbn:de:bsz:fn1-opus4-59166
SN  - 2212-8271
SS  - 2212-8271
U6  - https://doi.org/10.1016/j.procir.2019.04.060
DO  - https://doi.org/10.1016/j.procir.2019.04.060
VL  - 82.2019
SP  - 208
EP  - 213
ER  -