@article{SoltaniHojatiDaneshietal.2019,
  author    = {Babak Soltani and Faramarz Hojati and Amir Daneshi and Bahman Azarhoushang},
  title     = {Simulation of laser ablation mechanism of silicon nitride by ultrashort pulse laser},
  series   = {Procedia CIRP},
  volume    = {82.2019},
  issn      = {2212-8271},
  doi       = {10.1016/j.procir.2019.04.060},
  url       = {https://nbn-resolving.org/urn:nbn:de:bsz:fn1-opus4-59166},
  pages     = {208 -- 213},
  year      = {2019},
  language  = {en}
}