TY - JOUR U1 - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed) A1 - Kadivar, Mohammadali A1 - Shamray, Sergey A1 - Soltani, Babak A1 - Daneshi, Amir A1 - Azarhoushang, Bahman T1 - Laser-assisted micro-grinding of Si3N4 JF - Precision Engineering KW - Laser-assisted micro-grinding KW - Micro-grinding KW - Silicon nitride KW - Cutting forces KW - Surface roughness Y1 - 2019 SN - 0141-6359 SS - 0141-6359 U6 - https://doi.org/10.1016/j.precisioneng.2019.09.004 DO - https://doi.org/10.1016/j.precisioneng.2019.09.004 VL - 60.2019 SP - 394 EP - 404 ER -