@article{KadivarShamraySoltanietal.2019, author = {Kadivar, Mohammadali and Shamray, Sergey and Soltani, Babak and Daneshi, Amir and Azarhoushang, Bahman}, title = {Laser-assisted micro-grinding of Si3N4}, journal = {Precision Engineering}, volume = {60.2019}, issn = {0141-6359}, doi = {10.1016/j.precisioneng.2019.09.004}, pages = {394 -- 404}, year = {2019}, language = {en} }