@techreport{HusterMeschederValero2005,
  author    = {Rolf Huster and Ulrich Mescheder and R. Valero},
  title     = {Mikrotechnologie: Mikrofreiformerzeugung in Silizium},
  series = {Forschungsbericht},
  year      = {2005},
  language  = {de}
}