TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Keshavarzi, Shervin
A1  - Lima, Frederico
A1  - Kronast, Wolfgang
A1  - Mescheder, Ulrich
T1  - Sequential Nano-Explosion Using Patterned Porous Silicon
JF  - Journal of Microelectromechanical Systems
KW  - Porous silicon
KW  - Energetic material
KW  - MEMS
Y1  - 2018
SN  - 1057-7157
SS  - 1057-7157
U6  - https://doi.org/10.1109/JMEMS.2018.2797306
DO  - https://doi.org/10.1109/JMEMS.2018.2797306
VL  - 27.2018
IS  - 2
SP  - 250
EP  - 258
ER  -