@techreport{KovacsStoffel1992,
  author    = {Andras Kovacs and A. Stoffel},
  title     = {Optimierung der Technologie und Herstellung von freitragenden Polysilizium-Membranen},
  series = {Forschungsbericht},
  institution = {Weka-Verlag},
  address   = {Kissing},
  pages     = {3},
  year      = {1992},
  language  = {de}
}