@article{PongratzMeschederEhrlichetal.1989,
  author    = {S. Pongratz and Ulrich Mescheder and Ch. Ehrlich and H.-L. Huber and K. Kohlmann and W. Windbracke},
  title     = {State of the art of pattern placement accuracy of silicon X-ray master masks},
  series   = {Microelectronic Engineering},
  volume    = {09.1989},
  number    = {1-4},
  issn      = {0167-9317},
  doi       = {10.1016/0167-9317(89)90027-0},
  pages     = {117 -- 120},
  year      = {1989},
  language  = {de}
}