@inproceedings{KolginTumanovUkhovetal.1996,
  author    = {E. A. Kolgin and I. A. Tumanov and A. A. Ukhov and Ulrich Mescheder},
  title     = {Photometric device for control of micromechanical elements manufacturing},
  series = {Proceedings of third international scientific technical Conference of Actual Problems of electronic instrument engineering, APEIE-96, Vol. 2},
  pages     = {75 -- 76},
  year      = {1996},
  language  = {en}
}