TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Mescheder, Ulrich
A1  - Kötter, Christiane
T1  - Optical monitoring and control of Si wet etching
JF  - Sensors and Actuators A: Physical
KW  - Silicon micromachining
KW  - Light-controlled etch rate
KW  - Optical monitoring of etch rate
Y1  - 1999
SN  - 0924-4247
SS  - 0924-4247
U6  - https://doi.org/10.1016/S0924-4247(99)00212-5
DO  - https://doi.org/10.1016/S0924-4247(99)00212-5
VL  - 76.1999
IS  - 1-3
SP  - 425
EP  - 430
ER  -