TY - CHAP U1 - Konferenzveröffentlichung A1 - Reichardt, M. A1 - Mescheder, Ulrich A1 - Nosseir, Nagy T1 - Simulation of a Micro-Fabricated Inclinometer T2 - Proceedings of the International Conference on Mathematics and Engineering Techniques in Medicine and Biological Sciences, METMBS '00; Las Vegas, Nevada, June 26 - 29, 2000 Y1 - 2000 SN - 1-892512-60-2 SB - 1-892512-60-2 SP - 309 EP - 314 PB - CSREA Press ER -