TY  - CHAP
U1  - Konferenzveröffentlichung
A1  - Mescheder, Ulrich
A1  - Kovacs, Andras
A1  - Kronast, Wolfgang
A1  - Barsony, Istvan
A1  - Adam, Maria
A1  - Dücsö, Cs.
T1  - Porous silicon as multifunctional material in MEMS
T2  - Proceedings of the 2001 1st IEEE Conference on Nanotechnology : IEEE-NANO 2001 : October 28-30, 2001, Maui, Hawaii
KW  - Porous silicon
KW  - MEMS
KW  - Microsystems
KW  - Micromachining
Y1  - 2001
SN  - 0-7803-7215-8
SB  - 0-7803-7215-8
U6  - https://doi.org/10.1109/NANO.2001.966471
DO  - https://doi.org/10.1109/NANO.2001.966471
SP  - 483
EP  - 488
ER  -