TY  - CHAP
U1  - Konferenzveröffentlichung
A1  - Mescheder, Ulrich
A1  - Alavi, M.
A1  - Hiltmann, K.
A1  - Lizeau, Ch.
A1  - Nachtigall, Christoph
A1  - Sandmaier, H.
T1  - Local Laser Bonding for Low Temperature Budget
T2  - Transducers '01 Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10-14, 2001, Munich, Germany
KW  - Wafer bonding
KW  - Laser micromachining
Y1  - 2001
SN  - 978-3-540-42150-4
SB  - 978-3-540-42150-4
SP  - 218
EP  - 221
PB  - Springer
CY  - Berlin
ER  -