TY  - CHAP
U1  - Konferenzveröffentlichung
A1  - Mescheder, Ulrich
A1  - Kronast, Wolfgang
A1  - Naychuk, N.
T1  - Reliability Investigations in Micromechanical Devices
T2  - Eurosensors XVI, The 16th European Conference on Solid-State Transducers, September 15-18, 2002 Prague, Czech Republic
Y1  - 2002
SN  - 80-01-02576-4
SB  - 80-01-02576-4
SP  - 145
EP  - 146
S1  - 2
ER  -