TY  - CHAP
U1  - Konferenzveröffentlichung
A1  - Freudenreich, Markus
A1  - Mescheder, Ulrich
A1  - Somogyi, Gergoe
T1  - Design Consideration and Realization of a Novel Micromechanical Bi-Stable Switch
T2  - Transducers '03: The 12th International Conference on Solid-State Sensors, Actuators and Microsystems; Digest of Technical Papers, Volume 2
Y1  - 2003
SN  - 0-7803-7731-1
SB  - 0-7803-7731-1
SP  - 1096
EP  - 1099
PB  - IEEE
ER  -