TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Mescheder, Ulrich
A1  - Kronast, Wolfgang
A1  - Naychuk, N.
T1  - Reliability investigations in micromechanical devices
JF  - Sensors and Actuators A: Physical
KW  - Reliability
KW  - Fatigue and crack propagation in crystalline silicon
KW  - Lifetime
Y1  - 2004
SN  - 0924-4247
SS  - 0924-4247
U6  - https://doi.org/10.1016/j.sna.2003.10.054
DO  - https://doi.org/10.1016/j.sna.2003.10.054
VL  - 110.2004
IS  - 1-3
SP  - 150
EP  - 156
ER  -