@article{MeschederSomogyiFreudenreichetal.,
  author    = {Ulrich Mescheder and Gergoe Somogyi and Markus Freudenreich and Carlos Estan},
  title     = {Mikrotechnisch hergestellter Membranspiegel f{\"u}r aktive Fokussierung},
  series = {Horizonte},
  number    = {27},
  issn      = {1432-9174},
  pages     = {16 -- 20},
  language  = {de}
}