TY - JOUR U1 - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed) A1 - Mescheder, Ulrich A1 - Estan, Carlos A1 - Somogyi, Gergoe A1 - Freudenreich, Markus T1 - Distortion optimized focusing mirror device with large aperture JF - Sensors and Actuators A: Physical KW - MOEMS KW - Electrostatic focusing device KW - FEM simulation KW - SOI Y1 - 2006 SN - 0924-4247 SS - 0924-4247 U6 - https://doi.org/10.1016/j.sna.2005.09.034 DO - https://doi.org/10.1016/j.sna.2005.09.034 VL - 130-131/2006 IS - August SP - 20 EP - 27 ER -