TY - JOUR U1 - Wissenschaftlicher Artikel A1 - Azarhoushang, Bahman A1 - Soltani, Babak A1 - Zahedi, Ali T1 - Laser-assisted grinding of silicon nitride by picosecond laser JF - The International Journal of Advanced Manufacturing Technology KW - Laser-assisted grinding KW - Silicon nitride KW - Creep feed grinding KW - Ultra-short pulsed laser Y1 - 2017 SN - 1433-3015 SS - 1433-3015 U6 - https://doi.org/10.1007/s00170-017-0440-9 DO - https://doi.org/10.1007/s00170-017-0440-9 VL - 93.2017 IS - 5-8 SP - 2517 EP - 2529 ER -