TY - CHAP U1 - Konferenzveröffentlichung A1 - Mescheder, Ulrich A1 - Khazi, Isman M. A1 - Kovacs, Andras A1 - Ivanov, Alexey T1 - MOEMS based concept for miniaturized monochromators, spectrometers and tunable light sources T2 - 1. Baden-Württemberg Center of Applied Research Symposium on Information and Communication Systems: SInCom 2014; 12. December 2014 in Furtwangen KW - MOEMS KW - MEMS KW - Porous silicon KW - Photonic crystals KW - Dual tunability KW - Silicon anodization KW - Tunable optical filter KW - Monochromator KW - Spectrometer KW - Biosensor Y1 - 2014 UR - https://opus.hs-offenburg.de/frontdoor/deliver/index/docId/1782/file/proceedingsSInCom2014.pdf SN - 978-3-00-048182-6 SB - 978-3-00-048182-6 SP - 38 EP - 43 S1 - 6 ER -