@article{BucherBruggerKernetal.2002,
  author    = {Volker Bucher and J{\"u}rgen Brugger and Dieter Kern and Gyu M. Kim and Markus Schubert and Wilfried Nisch},
  title     = {Electrical properties of light-addressed sub-μm electrodes fabricated by use of nanostencil technology},
  series   = {Microelectronic Engineering},
  volume    = {61/62.2002},
  number    = {July},
  issn      = {0167-9317},
  doi       = {10.1016/S0167-9317(02)00422-7},
  pages     = {971 -- 980},
  year      = {2002},
  language  = {en}
}