@article{BucherKappSchwoerer,
  author    = {Volker Bucher and Diethard Kapp-Schwoerer},
  title     = {Plasmabeschichtung in der Mikrotechnik},
  series = {Mikroproduktion},
  number    = {5},
  issn      = {1614-4538},
  pages     = {24 -- 27},
  language  = {de}
}