TY - JOUR U1 - Zeitschriftenartikel, nicht wissenschaftlich A1 - Ivanov, Alexey A1 - Kovacs, Andras A1 - Mescheder, Ulrich T1 - Application of local backside contacts for structuring Of silicon with anodization: simulation and experiments BT - 30th Eurosensors Conference, EUROSENSORS 2016 JF - Procedia Engineering KW - Silicon anodization KW - Electrochemical etching KW - Simulation KW - Secondary current distribution KW - Local backside contacts KW - Structuring Y1 - 2016 SN - 1877-7058 SS - 1877-7058 U6 - https://doi.org/10.1016/j.proeng.2016.11.399 DO - https://doi.org/10.1016/j.proeng.2016.11.399 VL - 168.2016 SP - 1180 EP - 1183 ER -