TY  - CHAP
U1  - Buchbeitrag
A1  - Ivanov, Alexey
A1  - Mescheder, Ulrich
ED  - Korotcenkov, Ghenadii
T1  - Surface Micromachining (Sacrificial Layer) and Its Applications in Electronic Devices
T2  - Porous Silicon: Optoelectronics, Microelectronics, and Energy Technology Applications, Volume Three
KW  - Optoelectronics
KW  - Microelectronics
KW  - Energy
Y1  - 2016
SN  - 978-1-4822-6458-6
SB  - 978-1-4822-6458-6
SP  - 129
EP  - 141
PB  - CRC Press
CY  - Boca Raton
ER  -